Три зоны кварцевые Трубчатая Печь (80 мм (диаметр) 1200C Max) с 3 канала Gas Mixer и вакуумный насос


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Three Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge



Product Description


 


OTF-1200X-III-80-F3LV  is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.


SPECIFICATIONS

























































































Furnace Construction

  • Double layer steel casing with air cooling

  • High purity alumina fiber insulation for max. energy saving

  • Splitable cover for easy tube replacement



Power Consumption



5 KW



Input Voltage



AC 208-240V Single Phase, 50 or 60 Hz 



Maximum Temperature



1200 oC



ContinuousTemperature



1100 oC



Maximum Heating Rate



<= 20 oC /min



Heating Zone Length




  • Three zones: (880mm, 35" in total)


    • Zone 1: 220mm  (8.6" )

    • Zone 2: 440mm  (17.3")

    • Zone 3: 220 mm (8.6")




Constant Temperature Zone




  • If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC.

  • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC.



Temperature Accuracy



+/- 1oC



Heating Elements



Fe-Cr-Al Alloy doped by Mo



Temperature Controller




  • Three precision temperature controllers to control three zones separately.

  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

  • Built in overheating & broken thermocouple protection.

  • Over temperature protection and alarm allows for operation without attendant(s).

  • +/- 1 ºC temperature accuracy.

  • RS485 Communications Port.     



Quartz Tube& Sealing Flanges



Vacuum Sensor & Display



  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.

  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).


Vacuum Sealing Flanges

  • Two stainless steel flanges with both vacuum gauge and valves included.

  • Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr by using mechanical + moleculer pump.

  • Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.



Oxygen Monitoring



An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
         



Vacuum Pump



The vacuum pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace.


Gas Flow Meter and Pressure Meter

 



  • Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).


    •  Compact direct read flow meter, 10-100 cc/min.

    •  Compact direct read flow meter, 16-160 cc/min.

    •  Compact direct read flow meter, 25-250 cc/min.


  • Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.


ValvesFour stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately

Dimensions





  • Furnace: 1100 X 450 x 670 mm



  • Bottom Mobile case: 600x600x597 mm




Warranty



One year



Compliance




  • CE Certified






Pictures


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Buyer Feedback


Our furnaces are exported to more than 50 countries and have good feedback from our customers.


 


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How to make an order


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Company Information


Company Description:


Zhengzhou CY Scientific Instrument Co., Ltd is a professional high- tech enterprise,it has 20 years history of R&D,manufacture and sales in advanced materials.Many products are awarded as high-tech products and obtain patents.


 


Mainly products:





















Muffle furnace



Atmosphere furnace



Tube furnace



Dental sintering furnace



Vacuum furnace



Crucible furnace



Bottom loading furnace



Car bottom furnace



Etc.



 


        


 


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FAQ


1: Q: Are you muffle furnace manufacturer?                                                                                                                   


    A: Yes, we are professional muffle furnace manufacturer of China.


 


2. Q:What kind terms of payment can be accepted?


    A: For terms of payment, L/C, T/T, D/A, D/P, Western Union (can be) could accepted


 


3. Q: Can I ask for customized furnace?


    A: Yes, customized furnace is accepted.


 


4. Q: What about the delivery time?


    A: Normally within 15 days after receiving your payment or based on order quantity and production schedule.


 


5. Q: What about the guarantee period?


    A: The guarantee period is 12 months.


 


6. Q: What about the Minimum Order Quantity?


    A: The MOQ is 1 pcs


 





Contact Information


 Pamela


 

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